Kulah, H.Arikan, M.A.S.Yildirim, E.2020-05-122025-09-182020-05-122025-09-182011Yildirim, E.; Kulah, H.; Arikan, M.A.S.,"An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications", 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, pp. 250-253, (2011).9781457701573https://doi.org/10.1109/TRANSDUCERS.2011.5969441https://hdl.handle.net/20.500.12416/14220This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure. © 2011 IEEE.eninfo:eu-repo/semantics/closedAccessElectrostaticIn-PlaneMicrovalveParyleneConference Object10.1109/TRANSDUCERS.2011.59694412-s2.0-80052118278