Yıldırım, EnderArıkan, M. A. SahirKulah, Haluk2020-05-122020-05-122011Yildirim, E.; Kulah, H.; Arikan, M.A.S.,"An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications", 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, pp. 250-253, (2011).9781457701573http://hdl.handle.net/20.500.12416/3720This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure.eninfo:eu-repo/semantics/openAccessMicrovalveParylene,Electrostatic,In-planeConference Object25025310.1109/TRANSDUCERS.2011.5969441