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Browsing by Author "Arikan, M.A.S."

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    An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications
    (2011) Yildirim, E.; Yıldırım, Ender; Kulah, H.; Arikan, M.A.S.; 31835; Makine Mühendisliği
    This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure. © 2011 IEEE.