An Electrostatically Actuated Parylene Microvalve for Lab-On Applications
| dc.contributor.author | Kulah, H. | |
| dc.contributor.author | Arikan, M.A.S. | |
| dc.contributor.author | Yildirim, E. | |
| dc.date.accessioned | 2020-05-12T05:05:36Z | |
| dc.date.accessioned | 2025-09-18T15:44:15Z | |
| dc.date.available | 2020-05-12T05:05:36Z | |
| dc.date.available | 2025-09-18T15:44:15Z | |
| dc.date.issued | 2011 | |
| dc.description.abstract | This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure. © 2011 IEEE. | en_US |
| dc.identifier.citation | Yildirim, E.; Kulah, H.; Arikan, M.A.S.,"An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications", 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, pp. 250-253, (2011). | en_US |
| dc.identifier.doi | 10.1109/TRANSDUCERS.2011.5969441 | |
| dc.identifier.isbn | 9781457701573 | |
| dc.identifier.scopus | 2-s2.0-80052118278 | |
| dc.identifier.uri | https://doi.org/10.1109/TRANSDUCERS.2011.5969441 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.12416/14220 | |
| dc.language.iso | en | en_US |
| dc.relation.ispartof | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 -- 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 -- 5 June 2011 through 9 June 2011 -- Beijing -- 86248 | en_US |
| dc.rights | info:eu-repo/semantics/closedAccess | en_US |
| dc.subject | Electrostatic | en_US |
| dc.subject | In-Plane | en_US |
| dc.subject | Microvalve | en_US |
| dc.subject | Parylene | en_US |
| dc.title | An Electrostatically Actuated Parylene Microvalve for Lab-On Applications | en_US |
| dc.title | An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications | tr_TR |
| dc.type | Conference Object | en_US |
| dspace.entity.type | Publication | |
| gdc.author.scopusid | 7004588941 | |
| gdc.author.scopusid | 36165070100 | |
| gdc.author.scopusid | 6602231834 | |
| gdc.author.yokid | 31835 | |
| gdc.bip.impulseclass | C5 | |
| gdc.bip.influenceclass | C5 | |
| gdc.bip.popularityclass | C5 | |
| gdc.coar.access | metadata only access | |
| gdc.coar.type | text::conference output | |
| gdc.collaboration.industrial | false | |
| gdc.description.department | Çankaya University | en_US |
| gdc.description.departmenttemp | Yildirim E., METU, Department of Mechanical Engineering, Ankara, Turkey, Cankaya University, Department of Mechanical Engineering, Ankara, Turkey; Kulah H., METU, Department of Electrical and Electronics Engineering, Ankara, Turkey, METU, MEMS Research and Applications Center, Ankara, Turkey; Arikan M.A.S., METU, Department of Mechanical Engineering, Ankara, Turkey, METU, MEMS Research and Applications Center, Ankara, Turkey | en_US |
| gdc.description.endpage | 253 | en_US |
| gdc.description.publicationcategory | Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı | en_US |
| gdc.description.startpage | 250 | en_US |
| gdc.identifier.openalex | W2104569839 | |
| gdc.index.type | Scopus | |
| gdc.oaire.diamondjournal | false | |
| gdc.oaire.impulse | 0.0 | |
| gdc.oaire.influence | 2.5031544E-9 | |
| gdc.oaire.isgreen | false | |
| gdc.oaire.popularity | 1.2216569E-9 | |
| gdc.oaire.publicfunded | false | |
| gdc.oaire.sciencefields | 02 engineering and technology | |
| gdc.oaire.sciencefields | 0210 nano-technology | |
| gdc.oaire.sciencefields | 01 natural sciences | |
| gdc.oaire.sciencefields | 0104 chemical sciences | |
| gdc.openalex.collaboration | National | |
| gdc.openalex.fwci | 0.0 | |
| gdc.openalex.normalizedpercentile | 0.15 | |
| gdc.opencitations.count | 1 | |
| gdc.plumx.mendeley | 15 | |
| gdc.plumx.scopuscites | 1 | |
| gdc.scopus.citedcount | 1 | |
| relation.isOrgUnitOfPublication | 0b9123e4-4136-493b-9ffd-be856af2cdb1 | |
| relation.isOrgUnitOfPublication.latestForDiscovery | 0b9123e4-4136-493b-9ffd-be856af2cdb1 |