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An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications

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dc.contributor.authorYıldırım, Ender
dc.contributor.authorArıkan, M. A. Sahir
dc.contributor.authorKulah, Haluk
dc.contributor.authorID31835tr_TR
dc.date.accessioned2020-05-12T05:05:36Z
dc.date.available2020-05-12T05:05:36Z
dc.date.issued2011
dc.departmentÇankaya Üniversitesi, Mühendislik Fakültesi, Makine Mühendisliği Bölümüen_US
dc.description.abstractThis paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure.en_US
dc.identifier.citationYildirim, E.; Kulah, H.; Arikan, M.A.S.,"An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications", 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, pp. 250-253, (2011).en_US
dc.identifier.doi10.1109/TRANSDUCERS.2011.5969441
dc.identifier.endpage253en_US
dc.identifier.isbn9781457701573
dc.identifier.startpage250en_US
dc.identifier.urihttp://hdl.handle.net/20.500.12416/3720
dc.language.isoenen_US
dc.relation.ispartof2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11en_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectMicrovalveen_US
dc.subjectParylene,en_US
dc.subjectElectrostatic,en_US
dc.subjectIn-planeen_US
dc.titleAn Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applicationstr_TR
dc.titleAn Electrostatically Actuated Parylene Microvalve for Lab-On Applicationsen_US
dc.typeConference Objecten_US
dspace.entity.typePublication

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