An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications
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Date
2011
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Abstract
This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure. © 2011 IEEE.
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Keywords
Electrostatic, In-Plane, Microvalve, Parylene
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Citation
Yildirim, E.; Kulah, H.; Arikan, M.A.S.,"An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications", 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, pp. 250-253, (2011).
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2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 -- 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 -- 5 June 2011 through 9 June 2011 -- Beijing -- 86248
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Start Page
250
End Page
253