An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications
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Date
2011
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Abstract
This paper presents a novel electrostatic microvalve
to control in-plane flow on parylene based
lab-on-a-chip-devices. Normally-closed design of the
microvalve insulates the working fluid from the electric
field, while providing low leakage up to 40 kPa inlet
pressure. Prototypes are fabricated and tested for pull-in
and flow characterization. Pull-in voltage is measured to
be 150 V independent of the working fluid. No leakage is
detected up to 20 kPa inlet pressure.
Description
Keywords
Microvalve, Parylene,, Electrostatic,, In-plane
Turkish CoHE Thesis Center URL
Fields of Science
Citation
Yildirim, E.; Kulah, H.; Arikan, M.A.S.,"An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications", 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, pp. 250-253, (2011).
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Source
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11
Volume
Issue
Start Page
250
End Page
253